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Proceedings Paper

Extended damping model for out-of-plane comb driven micromirrors
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Paper Abstract

Since damping is the limiting factor for the reachable maximum deflection, it is a very important issue in the context of resonant microsystems. In this paper, we present an optimized comb design and an extended damping model for out-of-plane scanning micromirrors. It bases on the compact analytical model published by Sandner et al. (at the SPIE conference Photonics Europe in 2004). The basic concept of this model is to attribute viscous damping in the comb gaps as the dominant contributor of damping moments. The model is extended by findings from a fluidmechanical FEM model of an electrode finger. It also considers the effects from pressure and temperature changes. The extended model is verified and discussed in the context of experimental results. The primary goal of damping analysis and optimization is to minimize power consumption and to reduce driving voltage. To consider that, the damping of the out-of-plane electrode comb is discussed in the context of its capacitance. One of the results presented in this paper is a out-of-plane comb-drive with optimized drive efficiency.

Paper Details

Date Published: 23 January 2006
PDF: 12 pages
Proc. SPIE 6114, MOEMS Display, Imaging, and Miniaturized Microsystems IV, 61140J (23 January 2006); doi: 10.1117/12.645981
Show Author Affiliations
Thomas Klose, Fraunhofer Institute for Photonic Microsystems (Germany)
Thilo Sandner, Fraunhofer Institute for Photonic Microsystems (Germany)
Harald Schenk, Fraunhofer Institute for Photonic Microsystems (Germany)
Hubert Lakner, Fraunhofer Institute for Photonic Microsystems (Germany)


Published in SPIE Proceedings Vol. 6114:
MOEMS Display, Imaging, and Miniaturized Microsystems IV
Hakan Ürey; David L. Dickensheets; Bishnu P. Gogoi, Editor(s)

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