Share Email Print

Proceedings Paper

InP based QCL in MBE production machine
Author(s): Michel Garcia; Francois Julien Vermersch; Xavier Marcadet; Shailendra Bansropun; Mathieu Carras; Arnaud Wilk; Christine Chaix; Carlo Sirtori
Format Member Price Non-Member Price
PDF $17.00 $21.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Quantum Cascade Lasers (QCL), emitting between 5 and 9 μm, have been realised with a view to achieving QCLs fabrication on a production scale. The growth of the structures was carried out in a multi-wafer RIBER 49 system (13 x 2" platen), and the processing sequence involved an Inductively Coupled Plasma (ICP) step for homogeneity and reproducibility purposes. To validate the approach used, a first batch of lasers, emitting around 9μm, based on a design already published [1], has been realised. State of the art performance on these devices (Jth = 4.2 kA cm-2, η = 304 mW A-1, Pmax = 690 mW) has been achieved. A second set of strained balanced structures, emitting around 5.4μm, has been demonstrated, working in pulsed operation at room temperature(Jth = 3.9 kA cm-2, η = 362 mW A-1, Pmax = 420 mW).

Paper Details

Date Published: 22 February 2006
PDF: 7 pages
Proc. SPIE 6133, Novel In-Plane Semiconductor Lasers V, 613304 (22 February 2006); doi: 10.1117/12.645943
Show Author Affiliations
Michel Garcia, Alcatel Thales III-V Lab. (France)
Francois Julien Vermersch, Alcatel Thales III-V Lab. (France)
Xavier Marcadet, Alcatel Thales III-V Lab. (France)
Shailendra Bansropun, Thales Research & Technology (France)
Mathieu Carras, Alcatel Thales III-V Lab. (France)
Arnaud Wilk, RIBER’s Process Technology Ctr., IEMN (France)
Christine Chaix, RIBER’s Process Technology Ctr., IEMN (France)
Carlo Sirtori, Univ. of Paris VII (France)

Published in SPIE Proceedings Vol. 6133:
Novel In-Plane Semiconductor Lasers V
Carmen Mermelstein; David P. Bour, Editor(s)

© SPIE. Terms of Use
Back to Top