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Proceedings Paper

A 100-kHz thin disk Yb:YAG regenerative amplifier
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Paper Abstract

We developed the elemental technologies to construct a 500-W thin disk regenerative amplifier for EUV application. We obtained the well-polarized CW output of over 900 W without any compensation optics of the birefringence error. The extinction ratio of output was over 1:140. We developed and installed the water-cooled Pockels cell into the CW laser cavity to act as a polarization rotator by applying a DC-voltage to the cell. We confirmed that the cooled cell did not create distinguished birefringence and thermal lensing over 900-W operation. The deforming of thin-disk at high power operation was estimated by using a commercial M2 meter. We optimized the cavity configuration from the estimation results to obtain high beam quality. After the optimization, the M2 values kept up to 3.5 until the output reached to 400 W. At the 100-W output, the M2 in vertical and horizontal plane were 1.47 and 1.43, respectively.

Paper Details

Date Published: 23 February 2006
PDF: 9 pages
Proc. SPIE 6101, Laser Beam Control and Applications, 61011R (23 February 2006); doi: 10.1117/12.645775
Show Author Affiliations
Taisuke Miura, Extreme Ultraviolet Lithography System Development Association (Japan)
Akira Endo, Extreme Ultraviolet Lithography System Development Association (Japan)


Published in SPIE Proceedings Vol. 6101:
Laser Beam Control and Applications
Steven J. Davis; Michael C. Heaven; J. Thomas Schriempf; Alexis V. Kudryashov; Alan H. Paxton; Vladimir S. Ilchenko; Adolf Giesen; Detlef Nickel, Editor(s)

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