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Proceedings Paper

Evaluation of manufacturability for 3D photonic crystal waveguide with nanoimprint
Author(s): Takeya Shimomura; Kimio Ito; Nobuhito Toyama
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Paper Abstract

Currently a few hundreds nm dimension is employed to achieve visible and infrared light optical elements for optics field as nano-optics. On the other hand there are a lot of reports of nano-imprint experiment including under 50 nm for storage, bio-technology or semiconductor application. And one of the biggest advantages of nano-imprint is three dimensional fabrications at one imprint procedure. However already introduced two or three dimensional imprinted optical elements are either just confirming replication of conventional Fresnel optics or defect negligible lattice structure. Three dimensional nano-imprint mold (3D-mold) must have great potential for optics fabrication. The combination of 3D-mold and three dimensional nano-imprint method can create flexible optical behavior. Here practical fabrication trials for three dimensional photonic crystal waveguide with 3D-mold and nano-imprint technology are discussed. Particularly fabrication 3D-mold with quarts, nano-imprint methodology and waveguide structure with evaluation and simulation are focused.

Paper Details

Date Published: 1 March 2006
PDF: 8 pages
Proc. SPIE 6128, Photonic Crystal Materials and Devices IV, 61281O (1 March 2006); doi: 10.1117/12.645712
Show Author Affiliations
Takeya Shimomura, Dai Nippon Printing Co., Ltd. (Japan)
Kimio Ito, Dai Nippon Printing Co., Ltd. (Japan)
Nobuhito Toyama, Dai Nippon Printing Co., Ltd. (Japan)

Published in SPIE Proceedings Vol. 6128:
Photonic Crystal Materials and Devices IV
Ali Adibi; Shawn-Yu Lin; Axel Scherer, Editor(s)

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