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Proceedings Paper

5~10 GHz surface acoustic wave resonators and low-loss wide band filters using submicron fabrication technology
Author(s): K. Yamanouchi; Y. Satoh; H. Isono; D. Kawasaki
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Paper Abstract

We show the SAW resonators and ladder type SAW resonator filters using high coupling SiO2/5°Y-X LiNbO3 with Zero Temperature Coefficients of Frequency (TCF). The theoretical analysis of 5~10GHz ladder type filters including the propagation attenuations and resistive loss of interdigital transducers are shown. Finally the experimental results below 2.0dB insertion loss with a wide band and zero TCF at 5 ~ 10GHz-range are shown.

Paper Details

Date Published: 23 January 2006
PDF: 5 pages
Proc. SPIE 6109, Micromachining and Microfabrication Process Technology XI, 61090P (23 January 2006); doi: 10.1117/12.645639
Show Author Affiliations
K. Yamanouchi, Tohoku Institute of Technology (Japan)
Y. Satoh, Tohoku Institute of Technology (Japan)
H. Isono, Tohoku Institute of Technology (Japan)
D. Kawasaki, Tohoku Institute of Technology (Japan)

Published in SPIE Proceedings Vol. 6109:
Micromachining and Microfabrication Process Technology XI
Mary-Ann Maher; Harold D. Stewart; Jung-Chih Chiao, Editor(s)

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