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Proceedings Paper

Silicon flip-chip imaging with a resolution of 325-nm using solid-immersion lenses and the two-photon optical-beam induced current method
Author(s): Euan Ramsay; Nicholas Pleynet; Dong Xiao; Richard J. Warburton; Derryck T. Reid
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Paper Abstract

This paper reports the imaging of a silicon flip-chip with high resolution by detection of the photocurrent generated by the two-photon absorption of 1530nm light from a femtosecond Er:fiber laser. High resolution imaging was made possible by the inclusion of a silicon solid immersion lens, which increased the numerical aperture of the microscope. Using this technique, features on a sub-micron scale are clearly resolvable with excellent contrast, and the resolution of the system was found to be 325nm.

Paper Details

Date Published: 28 February 2006
PDF: 8 pages
Proc. SPIE 6108, Commercial and Biomedical Applications of Ultrafast Lasers VI, 61080G (28 February 2006); doi: 10.1117/12.645629
Show Author Affiliations
Euan Ramsay, Heriot-Watt Univ. (United Kingdom)
Nicholas Pleynet, Heriot-Watt Univ. (United Kingdom)
Dong Xiao, Heriot-Watt Univ. (United Kingdom)
Richard J. Warburton, Heriot-Watt Univ. (United Kingdom)
Derryck T. Reid, Heriot-Watt Univ. (United Kingdom)

Published in SPIE Proceedings Vol. 6108:
Commercial and Biomedical Applications of Ultrafast Lasers VI
Joseph Neev; Stefan Nolte; Alexander Heisterkamp; Christopher B. Schaffer, Editor(s)

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