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Proceedings Paper

Modeling and analysis of MEMS-based resonant sensor actuated by bent beam thermal actuator
Author(s): Pezhman A. Hassanpour; William L. Cleghorn; Ebrahim Esmailzadeh; James K. Mills
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Paper Abstract

In this paper, an analytical model of the mechanical behavior of a resonant beam sensor actuated by a bent beam thermal actuator is presented. The system is divided into two main subsystems: bent beam actuator and resonant beam sensor. Each subsystem is studied separately and then the model of the original system is derived based on the models of subsystems.

Paper Details

Date Published: 5 January 2006
PDF: 12 pages
Proc. SPIE 6111, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V, 61110W (5 January 2006); doi: 10.1117/12.645309
Show Author Affiliations
Pezhman A. Hassanpour, Univ. of Toronto (Canada)
William L. Cleghorn, Univ. of Toronto (Canada)
Ebrahim Esmailzadeh, Univ. of Ontario Institute of Technology (Canada)
James K. Mills, Univ. of Toronto (Canada)


Published in SPIE Proceedings Vol. 6111:
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V
Danelle M. Tanner; Rajeshuni Ramesham, Editor(s)

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