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Proceedings Paper

A curled-hinge comb micro-mirror using CMOS-MEMS process
Author(s): Y. R. Huang; H. M. Tai; H. P. Chou
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Paper Abstract

This paper presents a large displacement static-electricity curled-hinge comb micro-mirror made by a CMOS-MEMS process. A micro-spring is incorporated to reduce the stress effects and the process variation. A mirror with a size of 500um x 500um is made using three metal layers. The micro-spring made a metal layer and a poly layer with a size of 4um x 21um. The nature frequency is 727 Hz and the maximum displacement of the micro-mirror is 32um using a driving voltage of 25 volts. The process variation has been successfully reduced from 30% to 10%.

Paper Details

Date Published: 23 January 2006
PDF: 6 pages
Proc. SPIE 6109, Micromachining and Microfabrication Process Technology XI, 61090O (23 January 2006); doi: 10.1117/12.645214
Show Author Affiliations
Y. R. Huang, National Tsing Hua Univ. (Taiwan)
H. M. Tai, National Tsing Hua Univ. (Taiwan)
H. P. Chou, National Tsing Hua Univ. (Taiwan)


Published in SPIE Proceedings Vol. 6109:
Micromachining and Microfabrication Process Technology XI
Mary-Ann Maher; Harold D. Stewart; Jung-Chih Chiao, Editor(s)

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