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A polymer-based Fabry-Perot filter integrated with 3-D MEMS structures
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Paper Abstract

Polymers have been considered as one of the most versatile materials in making optical devices for communication and sensor applications. They provide good optical transparency to form filters, lenses and many optical components with ease of fabrication. They are scalable and compatible in dimensions with requirements in optics and can be fabricated on inorganic substrates, such as silicon and quartz. Recent polymer synthesis also made great progresses on conductive and nonlinear polymers, opening opportunities for new applications. In this paper, we discussed hybrid-material integration of polymers on silicon-based microelectromechanical system (MEMS) devices. The motivation is to combine the advantages of demonstrated silicon-based MEMS actuators and excellent optical performance of polymers. We demonstrated the idea with a polymer-based out-of-plane Fabry-Perot filter that can be self-assembled by scratch drive actuators. We utilized a fabrication foundry service, MUMPS (Multi-User MEMS Process), to demonstrate the feasibility and flexibility of integration. The polysilicon, used as the structural material for construction of 3-D framework and actuators, has high absorption in the visible and near infrared ranges. Therefore, previous efforts using a polysilicon layer as optical interfaces suffer from high losses. We applied the organic compound materials on the silicon-based framework within the optical signal propagation path to form the optical interfaces. In this paper, we have shown low losses in the optical signal processing and feasibility of building a thin-film Fabry-Perot filter. We discussed the optical filter designs, mechanical design, actuation mechanism, fabrication issues, optical measurements, and results.

Paper Details

Date Published: 23 January 2006
PDF: 8 pages
Proc. SPIE 6109, Micromachining and Microfabrication Process Technology XI, 610905 (23 January 2006); doi: 10.1117/12.645076
Show Author Affiliations
Ping (Cerina) Zhang, Univ. of Texas at Arlington (United States)
Kevin Le, Univ. of Texas at Arlington (United States)
Smitha Malalur-Nagaraja-Rao, Univ. of Texas at Arlington (United States)
Lun-Chen Hsu, Univ. of Texas at Arlington (United States)
J.-C. Chiao, Univ. of Texas at Arlington (United States)

Published in SPIE Proceedings Vol. 6109:
Micromachining and Microfabrication Process Technology XI
Mary-Ann Maher; Harold D. Stewart; Jung-Chih Chiao, Editor(s)

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