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Proceedings Paper

Laser-assisted synthesis of diamond-like carbon from cyclohexane liquid
Author(s): Y. X. Han; H. Ling; Y. F. Lu; M. J. O'Keefe; T. McKindra
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Paper Abstract

Diamond-like carbon (DLC) films were synthesized by KrF excimer laser irradiation of single-crystal Si substrates immersed in a cyclohexane liquid. The deposition process was performed with a peak laser power density of about 108 W/cm2 in open atmosphere at room temperature. Scanning electron microscopy (SEM), Raman spectroscopy and X-ray photoelectron spectroscopy (XPS) studies showed diamond-like characteristics of the deposited films. Optical emission spectroscopy (OES) of laser-induced plasmas of cyclohexane indicated decomposition of the cyclohexane molecules. A mechanism based on the dissociation of the cyclohexane molecules and condensation of energetic carbon atoms into diamond-like films was proposed to explain the process.

Paper Details

Date Published: 23 February 2006
PDF: 8 pages
Proc. SPIE 6107, Laser-based Micropackaging, 61070P (23 February 2006); doi: 10.1117/12.644984
Show Author Affiliations
Y. X. Han, Univ. of Nebraska, Lincoln (United States)
H. Ling, Univ. of Nebraska, Lincoln (United States)
Y. F. Lu, Univ. of Nebraska, Lincoln (United States)
M. J. O'Keefe, Univ. of Missouri, Rolla (United States)
T. McKindra, Univ. of Missouri, Rolla (United States)


Published in SPIE Proceedings Vol. 6107:
Laser-based Micropackaging
Friedrich G. Bachmann; Willem Hoving; Yongfeng Lu; Kunihiko Washio, Editor(s)

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