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Proceedings Paper

Process design and tracking support for MEMS
Author(s): A. Wagener; T. Schmidt; J. Popp; K. Hahn; R. Brück; D. Ortloff
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Paper Abstract

A MEMS process design, development and tracking system is presented. It allows the specification of processes for specific applications and the tracking of the development procedures. The system consists of several components. Based on a comprehensive database that is able to store and manage all process related design constraint data as well as development related data linked to the fabrication process itself. A design model representing the relations between application specific fabrication processes and the structural design flow will be presented. Subsequently the software environment, called PROMENADE, will be introduced meeting the requirements of this process approach.

Paper Details

Date Published: 23 January 2006
PDF: 8 pages
Proc. SPIE 6109, Micromachining and Microfabrication Process Technology XI, 610908 (23 January 2006); doi: 10.1117/12.644486
Show Author Affiliations
A. Wagener, Univ. of Siegen (Germany)
T. Schmidt, Univ. of Siegen (Germany)
J. Popp, Univ. of Siegen (Germany)
K. Hahn, Univ. of Siegen (Germany)
R. Brück, Univ. of Siegen (Germany)
D. Ortloff, Cavendish Kinetics (Netherlands)


Published in SPIE Proceedings Vol. 6109:
Micromachining and Microfabrication Process Technology XI
Mary-Ann Maher; Harold D. Stewart; Jung-Chih Chiao, Editor(s)

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