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Proceedings Paper

Use of non-digitized diffractive optical elements for high-throughput and damage-free laser materials processing
Author(s): Jun Amako; Eiichi Fujii; Yutaka Yamazaki; Tatsuya Shimoda
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Paper Abstract

As a means to accomplish high-throughput and damage-free processes, non-digitized diffractive beam splitters are effectual: they can afford to fully suppress undesired diffraction beams by containing as much light energy as possible in a fan-out of beams meant for the process. The surface-relief structures of the splitters are designed using a Fourier- iterative algorithm and are formed on high-quality fused silica substrates using direct laser writing and reactive ion etching. For a 13-beam splitter, for example, a non-digitized element gives an efficiency of 97% with SN=38, whereas a binary counterpart is as efficient as 78% with SN=5, where SN is defined as the ratio between the minimum of the fanout beam intensities and the maximum of higher-order diffraction intensities. We have tested these two types of elements in laser-cutting experiments and verified that the non-digitized element is far superior to the binary element.

Paper Details

Date Published: 23 February 2006
PDF: 8 pages
Proc. SPIE 6107, Laser-based Micropackaging, 61070D (23 February 2006); doi: 10.1117/12.644440
Show Author Affiliations
Jun Amako, Seiko Epson Corp. (Japan)
Eiichi Fujii, Seiko Epson Corp. (Japan)
Yutaka Yamazaki, Seiko Epson Corp. (Japan)
Tatsuya Shimoda, Seiko Epson Corp. (Japan)

Published in SPIE Proceedings Vol. 6107:
Laser-based Micropackaging
Friedrich G. Bachmann; Willem Hoving; Yongfeng Lu; Kunihiko Washio, Editor(s)

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