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Proceedings Paper

Laser processing of advanced materials with high brightness solid-state lasers at 532 nm
Author(s): T. Riesbeck; A. Binder; H. J. Eichler
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Paper Abstract

Many materials e.g. diamond or silicon do not show sufficient absorption at one micron, the fundamental wavelength of Nd-based solid-state laser sources. Frequency conversion to the second and fourth harmonic allows the efficient processing of these materials. High beam quality is another important property for micro material processing with lasers. It facilitates small focus diameters and due to high Rayleigh length even at strong focusing drilling of holes with high aspect ratio. Together with high average output powers it allows fast processes with high quality. At least flexible pulse peak power and repetition rate is necessary to optimize the process. Two laser systems which fulfill these requirements are investigated. A pulse pumped Nd:YAP system which delivers an average output power of 124 W at the second harmonic and a Nd:YAG with an average output power up to 50 W in the second harmonic. Due to its active Q-switch the pulse peak power of this system is variable in a wide range. Efficient laser processing of different ceramics with these laser system are presented.

Paper Details

Date Published: 1 March 2006
PDF: 11 pages
Proc. SPIE 6106, Photon Processing in Microelectronics and Photonics V, 610603 (1 March 2006); doi: 10.1117/12.642791
Show Author Affiliations
T. Riesbeck, Technische Univ. Berlin (Germany)
A. Binder, Laser und Medizin Technologie Berlin GmbH (Germany)
H. J. Eichler, Technische Univ. Berlin (Germany)
Laser und Medizin Technologie Berlin GmbH (Germany)

Published in SPIE Proceedings Vol. 6106:
Photon Processing in Microelectronics and Photonics V
David B. Geohegan; Frank Träger; Jan J. Dubowski; Tatsuo Okada; Craig B. Arnold; Michel Meunier; Andrew S. Holmes, Editor(s)

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