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Proceedings Paper

Laser slotting of silicon for inkjet printer heads
Author(s): Tuan Anh Mai; Delphine Perrottet; Max Wiki; Bernold Richerzhagen
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Paper Abstract

Inside inkjet-printer heads, a silicon chip is used as a barrier between the orifice plate, which contains hundreds of nozzles, and the ink reservoir. The silicon chips used to create the barriers have to be drilled. The conventional manufacturing technique (sandblasting) does not anymore provide satisfactory results for the new generation of printers. The water-jet-guided laser, a hybrid technology which uses a water jet to guide a laser beam, has recently been adapted to this application, showing very promising results combining high processing speed and quality.

Paper Details

Date Published: 23 February 2006
PDF: 5 pages
Proc. SPIE 6107, Laser-based Micropackaging, 61070I (23 February 2006); doi: 10.1117/12.641382
Show Author Affiliations
Tuan Anh Mai, Synova SA (Switzerland)
Delphine Perrottet, Synova SA (Switzerland)
Max Wiki, Synova SA (Switzerland)
Bernold Richerzhagen, Synova SA (Switzerland)

Published in SPIE Proceedings Vol. 6107:
Laser-based Micropackaging
Friedrich G. Bachmann; Willem Hoving; Yongfeng Lu; Kunihiko Washio, Editor(s)

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