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Proceedings Paper

Advancing three-dimensional MEMS by complimentary laser micro manufacturing
Author(s): Jeremy A. Palmer; John D. Williams; Tom Lemp; Tom M. Lehecka; Francisco Medina; Ryan B. Wicker
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Paper Abstract

This paper describes improvements that enable engineers to create three-dimensional MEMS in a variety of materials. It also provides a means for selectively adding three-dimensional, high aspect ratio features to pre-existing PMMA micro molds for subsequent LIGA processing. This complimentary method involves in situ construction of three-dimensional micro molds in a stand-alone configuration or directly adjacent to features formed by x-ray lithography. Three-dimensional micro molds are created by micro stereolithography (MSL), an additive rapid prototyping technology. Alternatively, three-dimensional features may be added by direct femtosecond laser micro machining. Parameters for optimal femtosecond laser micro machining of PMMA at 800 nanometers are presented. The technical discussion also includes strategies for enhancements in the context of material selection and post-process surface finish. This approach may lead to practical, cost-effective 3-D MEMS with the surface finish and throughput advantages of x-ray lithography. Accurate three-dimensional metal microstructures are demonstrated. Challenges remain in process planning for micro stereolithography and development of buried features following femtosecond laser micro machining.

Paper Details

Date Published: 23 January 2006
PDF: 8 pages
Proc. SPIE 6109, Micromachining and Microfabrication Process Technology XI, 61090A (23 January 2006); doi: 10.1117/12.641244
Show Author Affiliations
Jeremy A. Palmer, Sandia National Labs. (United States)
John D. Williams, Sandia National Labs. (United States)
Tom Lemp, Sandia National Labs. (United States)
Tom M. Lehecka, Pennsylvania State Univ. Electro Optics Ctr. (United States)
Francisco Medina, The Univ. of Texas at El Paso (United States)
Ryan B. Wicker, The Univ. of Texas at El Paso (United States)


Published in SPIE Proceedings Vol. 6109:
Micromachining and Microfabrication Process Technology XI
Mary-Ann Maher; Harold D. Stewart; Jung-Chih Chiao, Editor(s)

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