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Proceedings Paper

Portable optical microscope-on-a-chip
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Paper Abstract

In this paper, we present a novel high resolution optical imaging device on chip. It is based on a line of nano holes defined in an optically opaque aluminum film on a CMOS imaging sensor chip. Because it's free of bulky optical elements and compatible to the planar micro fabrication process, it is very promising to become an important component for the on-chip high resolution imaging in the future. The fabrication and operation of this novel on-chip microscope is explained in details. The performance is evaluated theoretically and is verified experimentally by examining the profile of a laser spot formed by a 10X objective lens.

Paper Details

Date Published: 28 February 2006
PDF: 8 pages
Proc. SPIE 6095, Nanobiophotonics and Biomedical Applications III, 609509 (28 February 2006); doi: 10.1117/12.640328
Show Author Affiliations
Xiquan Cui, California Institute of Technology (United States)
Xin Heng, California Institute of Technology (United States)
David Erickson, Cornell Univ. (United States)
Demetri Psaltis, California Institute of Technology (United States)
Changhuei Yang, California Institute of Technology (United States)


Published in SPIE Proceedings Vol. 6095:
Nanobiophotonics and Biomedical Applications III
Alexander N. Cartwright; Dan V. Nicolau, Editor(s)

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