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Proceedings Paper

Crossed beam irradiation for femtosecond laser micro and nanomachining with three-dimensionally isotropic spatial resolution
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Paper Abstract

We describe the use of a crossed-beam irradiation system in three-dimensional femtosecond laser microprocessing to obtain three-dimensionally isotropic spatial resolution. In the crossed-beam geometry, two orthogonal objective lenses are arranged to share a common focal point. The synthesized focal spot produces an isotropic illumination volume. We demonstrate that microfluidic channels with substantially circular cross-sectional shapes can be directly fabricated inside glass by using the crossed-beam irradiation system.

Paper Details

Date Published: 28 February 2006
PDF: 6 pages
Proc. SPIE 6108, Commercial and Biomedical Applications of Ultrafast Lasers VI, 61080S (28 February 2006); doi: 10.1117/12.639921
Show Author Affiliations
K. Sugioka, RIKEN-The Institute of Physical and Chemical Research (Japan)
K. Midorikawa, RIKEN-The Institute of Physical and Chemical Research (Japan)


Published in SPIE Proceedings Vol. 6108:
Commercial and Biomedical Applications of Ultrafast Lasers VI
Joseph Neev; Stefan Nolte; Alexander Heisterkamp; Christopher B. Schaffer, Editor(s)

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