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Proceedings Paper

Defect classification for the inspection of TFT LCD glass
Author(s): DaeCheol Lim; Dae-Gyu Seo; DaeHwa Jeong
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Paper Abstract

Serious pattern defects and particles co-exist on the glass and only a few defects can cause serious quality problem. Now, if there would be a way to classify the defect by its potential lethality, it would be useful to control the product quality and loss of review time. This paper presents a method to classify the defect by using reviewing images. First, several defect types were investigated to develop an algorithm. In next, efficiency of the algorithm was verified in a plant. The result was good enough to utilize the information of classified defect type. Finally, the algorithm was applied to remove the information of trivial defects. The result was good to increase a throughput of whole process under little risk.

Paper Details

Date Published: 6 December 2005
PDF: 6 pages
Proc. SPIE 6051, Optomechatronic Machine Vision, 60510F (6 December 2005); doi: 10.1117/12.639878
Show Author Affiliations
DaeCheol Lim, LG Electronics (South Korea)
Dae-Gyu Seo, LG Electronics (South Korea)
DaeHwa Jeong, LG Electronics (South Korea)

Published in SPIE Proceedings Vol. 6051:
Optomechatronic Machine Vision
Kazuhiko Sumi, Editor(s)

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