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Proceedings Paper

Interferogram analysis for flatness metrology
Author(s): Victor Nascov; Adrian Timcu; Dan Apostol; Florin Garoi; Victor Damian; Iuliana Iordache; Petre Cătălin Logofătu
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Paper Abstract

Presented in this paper are numerical algorithms necessary to determine the surface error by means of optical interferometry. These algorithms are based on digital processing of phase-modulated fringe patterns, and are using the discrete Fourier transform method.

Paper Details

Date Published: 14 December 2005
PDF: 8 pages
Proc. SPIE 5972, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies II, 59721C (14 December 2005); doi: 10.1117/12.639776
Show Author Affiliations
Victor Nascov, National Institute for Laser, Plasma and Radiation Physics (Romania)
Adrian Timcu, National Institute for Laser, Plasma and Radiation Physics (Romania)
Dan Apostol, National Institute for Laser, Plasma and Radiation Physics (Romania)
Florin Garoi, National Institute for Laser, Plasma and Radiation Physics (Romania)
Victor Damian, National Institute for Laser, Plasma and Radiation Physics (Romania)
Iuliana Iordache, National Institute for Laser, Plasma and Radiation Physics (Romania)
Petre Cătălin Logofătu, National Institute for Laser, Plasma and Radiation Physics (Romania)


Published in SPIE Proceedings Vol. 5972:
Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies II
Ovidiu Iancu; Adrian Manea; Paul Schiopu; Dan Cojoc, Editor(s)

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