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Proceedings Paper

SU 8 used as optical waveguide in integrated optical microsensor for biological applications
Author(s): Raluca Műller; P. Obreja; M. Kusko; D. Esinenco; C. Tibeica; G. Conache; L. Buia; D. Apostol; V. Damian; M. Mateescu; Mirela Diaconu; Lucia Moldovan
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Paper Abstract

We present preliminary experiments for an integrated optical sensor based on a Mach-Zehnder interferometer for biological applications. The sensor is sensitive to refractive index change produced by the presence of a biological species in the cladding of the optical waveguide. A "window" can be patterned in the upper cladding, so that the evanescent wave can be in direct contact with the environmental (the sensitive layer). We investigated as optical waveguides a new material, SU-8, a negative photoresist well known from the development of 3D micromachmed structures. We structured, by photolithographic techniques, rib and channel optical waveguides. We studied the influence of the silicon substrate on propagation losses and the possibility to use these losses for the selective attenuation of the higher order modes on the vertical direction. As biological materials we experimented collagen, which is a bio-polymer which can bind different enzymes or antibodies.

Paper Details

Date Published: 14 December 2005
PDF: 6 pages
Proc. SPIE 5972, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies II, 59720Z (14 December 2005); doi: 10.1117/12.639745
Show Author Affiliations
Raluca Műller, National Institute for R&D in Microtechnologies (Romania)
P. Obreja, National Institute for R&D in Microtechnologies (Romania)
M. Kusko, National Institute for R&D in Microtechnologies (Romania)
D. Esinenco, National Institute for R&D in Microtechnologies (Romania)
C. Tibeica, National Institute for R&D in Microtechnologies (Romania)
G. Conache, National Institute for R&D in Microtechnologies (Romania)
L. Buia, National Institute for R&D in Microtechnologies (Romania)
D. Apostol, National Institute of Laser, Plasma and Radiation Physics (Romania)
V. Damian, National Institute of Laser, Plasma and Radiation Physics (Romania)
M. Mateescu, National Institute for Biological Sciences (Romania)
Mirela Diaconu, National Institute for Biological Sciences (Romania)
Lucia Moldovan, National Institute for Biological Sciences (Romania)


Published in SPIE Proceedings Vol. 5972:
Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies II
Ovidiu Iancu; Adrian Manea; Paul Schiopu; Dan Cojoc, Editor(s)

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