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Proceedings Paper

Characterization of chemical microsensors in SAW systems
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Paper Abstract

Between other sensing and identification technologies that of Surface Acoustic Waves, (SAW), is a unique sensing system. The principal advantage to most SAW systems is that they can use two or three SAW sensors and compare the measurements between them, providing a good accuracy. We have carried out the design of both piezoelectric substrate and interdigital transducers, (IDTs), and has tested them in a delay line mode operation. The measurement of changes in the surface waves characteristics were materialized by applying of a radio frequency electric field to the piezoelectric crystal by means of IDTs. The finger width of the IDTs was measured by high accuracy optical coherent method. The results are presented in the work. The potential development of microsensors as an array of four or five miniature sensors, sensitive to Werent chemicals may be used as mobile chemical detecting units carried by remote control vehicles to the site chemical contamination.

Paper Details

Date Published: 14 December 2005
PDF: 8 pages
Proc. SPIE 5972, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies II, 59720W (14 December 2005); doi: 10.1117/12.639742
Show Author Affiliations
Ovidiu Iancu, Politehnica Univ. of Bucharest (Romania)
Constantin Grigoriu, National Institute for Laser, Plasma and Radiation Physics (Romania)
Ionica Cristea, Politehnica Univ. of Bucharest (Romania)
Monica Nadasan, Politehnica Univ. of Bucharest (Romania)
Neculai Grosu, Politehnica Univ. of Bucharest (Romania)


Published in SPIE Proceedings Vol. 5972:
Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies II

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