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Proceedings Paper

MOEMS for environmental applications: real-time air pollution monitoring system using chemo-optical sensor
Author(s): Mira Caldararu; A. Vasile; F. Craciunoiu; Dana Cristea; Anca Paraschiv; F. Caldararu
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Paper Abstract

Air pollution monitoring needs real-time measurement systems for low pollutant concentration levels. The authors have designed and manufactured an experimental integrated chemo-optical sensor on silicon containing a sol-gel layer, a silicon nitride waveguide and a silicon photodiode. This sensor was included in a measurement system, which has its own microcontroller for data acquisition and an autonomous power supply. The measured data are calculated and managed when the microcontroller is serially connected to the computer, dedicated software being performed. In this way, the "classical" laboratory equipment for air pollution measurements can be replaced by an autonomous real-time measurement system.

Paper Details

Date Published: 14 December 2005
PDF: 6 pages
Proc. SPIE 5972, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies II, 59720U (14 December 2005); doi: 10.1117/12.639740
Show Author Affiliations
Mira Caldararu, ECOSEN Ltd. (Romania)
A. Vasile, Politechnica Univ., Bucharest (Romania)
F. Craciunoiu, Institute of Microtechnology (Romania)
Dana Cristea, Institute of Microtechnology (Romania)
Anca Paraschiv, Marathon Labs. Ltd. (Romania)
F. Caldararu, ECOSEN Ltd. (Romania)
Ecological Univ. (Romania)

Published in SPIE Proceedings Vol. 5972:
Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies II
Ovidiu Iancu; Adrian Manea; Paul Schiopu; Dan Cojoc, Editor(s)

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