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Proceedings Paper

Laser ablated particles behaviour in PLD systems
Author(s): A. Marcu; C. Grigoriu; K. Yatsui
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Paper Abstract

A novel three-dimensional model has been proposed for simulating plume behavior and 'micron-sized particles' movement and interaction. It describes particles expansion in vacuum or into an environmental gas and particles interaction with various obstacles. The model simulates 'standard' Pulsed Laser Deposition (PLD) system behavior, but also some droplet reduction techniques used in PLD (e.g. shadow mask technique) having good results in plasma expansion for the first several centimeters from target. The carried out simulations have shown that in the PLD with plasma reflection (PLDPR) the influence of mass and particle's surface area on the droplets trajectory is significant. By increasing of the particle mass or by decreasing particle's surface, the probability of the particle to be driven into the deposition area by plume fine particles is considerably decreasing.

Paper Details

Date Published: 14 December 2005
PDF: 6 pages
Proc. SPIE 5972, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies II, 59720P (14 December 2005); doi: 10.1117/12.639734
Show Author Affiliations
A. Marcu, National Institute for Laser, Plasma, Radiation Physics (Romania)
C. Grigoriu, National Institute for Laser, Plasma, Radiation Physics (Romania)
K. Yatsui, Nagaoka Univ. of Technology (Japan)


Published in SPIE Proceedings Vol. 5972:
Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies II
Ovidiu Iancu; Adrian Manea; Paul Schiopu; Dan Cojoc, Editor(s)

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