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Proceedings Paper

Characterization of DUV optical materials by direct absorption measurements and LIF
Author(s): W. Triebel
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Paper Abstract

Calcium fluoride and fused silica are low absorbing key optical bulk materials for pulsed DUV laser application. Due to their large band gap fluoride thin films play a key role for applications in the DUV spectral region. For their main use in laser microlithography, these materials are commonly characterized by in situ transmission measurements. A differentiation is not possible between absorption and scattering. Therefore, experimental techniques are highly attractive which selectively characterize the absorption process using small samples. A direct absorption measurement method using laser induced deflection of a probe beam (LID) was introduced and applied to bulk and thin film materials. Laser induced fluorescence (LIF) in bulk materials and coatings is investigated to correlate the absorption with microscopic properties like intrinsic and extrinsic defects.

Paper Details

Date Published: 7 February 2006
PDF: 16 pages
Proc. SPIE 5991, Laser-Induced Damage in Optical Materials: 2005, 59911P (7 February 2006); doi: 10.1117/12.639133
Show Author Affiliations
W. Triebel, Institut für Physikalische Hochtechnologie (Germany)

Published in SPIE Proceedings Vol. 5991:
Laser-Induced Damage in Optical Materials: 2005
Gregory J. Exarhos; Arthur H. Guenther; Keith L. Lewis; Detlev Ristau; M.J. Soileau; Christopher J. Stolz, Editor(s)

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