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Proceedings Paper

Modelling of 2D super-long-period multilayer gratings applied in spectral ellipsometry
Author(s): Vlček Jaroslav; Pištora Jaromír; Postava Kamil; Yamaguchi Tomuo; Brings Reiner
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Paper Abstract

Dispersion of ellipsometrical angles analyzed using theoretical model as well as over measured data is presented. Binary multilayer grating is modeled via rigorous coupled wave method. The special attention is devoted to additional oxidation of inter-dot area and to an interaction of finite optical beam with super-long-period structure. The results are discussed in the relation to experimental data.

Paper Details

Date Published: 6 December 2006
PDF: 5 pages
Proc. SPIE 5945, 14th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 59450A (6 December 2006); doi: 10.1117/12.638815
Show Author Affiliations
Vlček Jaroslav, Technical Univ. Ostrava (Czech Republic)
Pištora Jaromír, Technical Univ. Ostrava (Czech Republic)
Postava Kamil, Technical Univ. Ostrava (Czech Republic)
Yamaguchi Tomuo, Shizuoka Univ. (Japan)
Brings Reiner, Jobin Yvon GmbH (Germany)


Published in SPIE Proceedings Vol. 5945:
14th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics
Anton Štrba; Dagmar Senderákova; Miroslav Hrabovský, Editor(s)

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