Share Email Print
cover

Proceedings Paper

Development of a new joint-based rotating microstucture
Author(s): Eleonora Ferraris; Irene Fassi; Biagio De Masi
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Details

Date Published:
PDF
Proc. SPIE 6037, Device and Process Technologies for Microelectronics, MEMS, and Photonics IV, ; doi: 10.1117/12.638753
Show Author Affiliations
Eleonora Ferraris, Istituto di Tecnologie Industriali e Automazione (Italy)
STMicroelectronics (Italy)
Irene Fassi, Istituto di Tecnologie Industriali e Automazione (Italy)
Biagio De Masi, STMicroelectronics (Italy)


Published in SPIE Proceedings Vol. 6037:
Device and Process Technologies for Microelectronics, MEMS, and Photonics IV
Jung-Chih Chiao; Andrew S. Dzurak; Chennupati Jagadish; David V. Thiel, Editor(s)

© SPIE. Terms of Use
Back to Top