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Proceedings Paper

Optical scanning devices based on PZT thick films formed by aerosol deposition method
Author(s): Jae-Hyuk Park; Jun Akedo; Maxim Lebedev; Harumichi Sato
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Paper Abstract

High-speed metal-based optical microscanning devices with low production cost and simple fabrication process wre successfully fabricated by direct deposition of piezoelectric materials using the aerosol deposition method (ADM) onto the micro-structured metal scanner frame. Large optical scanning angle of 35° at high resonance frequency of 23.6 kHz was achieved in ambient air without vacuum package. The scanner is applicable to SVGA high-resolution display of 800 x 600 or more. This method is a powerful tool for realizing ceramic integration with metal components.

Paper Details

Date Published: 4 January 2006
PDF: 6 pages
Proc. SPIE 6037, Device and Process Technologies for Microelectronics, MEMS, and Photonics IV, 60371S (4 January 2006); doi: 10.1117/12.638489
Show Author Affiliations
Jae-Hyuk Park, National Institute of Advanced Industrial Science and Technology (Japan)
Jun Akedo, National Institute of Advanced Industrial Science and Technology (Japan)
Maxim Lebedev, National Institute of Advanced Industrial Science and Technology (Japan)
Harumichi Sato, National Institute of Advanced Industrial Science and Technology (Japan)


Published in SPIE Proceedings Vol. 6037:
Device and Process Technologies for Microelectronics, MEMS, and Photonics IV
Jung-Chih Chiao; Andrew S. Dzurak; Chennupati Jagadish; David V. Thiel, Editor(s)

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