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Proceedings Paper

Conception and design of a thermal valveless micropump
Author(s): G. Manzoni; S. Heisig; T. Takano; C. Kocer; H. Goto; T. Mihara; R. Maeda
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Paper Abstract

This paper describes the conception and design of a micropump for gas, with no moving or deformable parts, for use on the future sensor network system, which includes environment monitoring. This design is original because of the complete absence of moving parts for the pumping of gas. In fact, fluid movement was obtained by means of repetitive heating and cooling cycles of the gas, in the pump chamber. The prototyping work is on going and the first results are presented with particular emphasis on thermal characterization.

Paper Details

Date Published: 19 January 2006
PDF: 9 pages
Proc. SPIE 6036, BioMEMS and Nanotechnology II, 60360I (19 January 2006); doi: 10.1117/12.638467
Show Author Affiliations
G. Manzoni
S. Heisig, AIST MEMS (Japan)
T. Takano, AIST MEMS (Japan)
C. Kocer, National Institute for Material Science (Japan)
Univ. of Sydney (Australia)
H. Goto, AIST MEMS (Japan)
T. Mihara, Olympus Corp. (Japan)
R. Maeda, AIST MEMS (Japan)


Published in SPIE Proceedings Vol. 6036:
BioMEMS and Nanotechnology II
Dan V. Nicolau, Editor(s)

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