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Proceedings Paper

Photovoltaic effect of ferroelectric PLZT in a layered and preferentially oriented film
Author(s): Masaaki Ichiki; Harumi Furue; Takeshi Kobayashi; Yasushi Morikawa; Takeshi Nakada; Chiaki Endo; Kazuhiro Nonaka; Ryutaro Maeda
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Paper Abstract

Photovoltaic (Pb,La)(Zr,Ti)O3 (PLZT) films in a layered structure of different crystallographic orientations are fabricated by an optimized metalorganic deposition (MOD) method. Such films of (001) orientation exhibit a photovoltaic electrical power of approximately 20 times higher than that of random films. The anisotropic optical properties of the oriented films, including dark conductivity, photoconductivity and photovoltaic tensor surfaces, are obtained quantitatively. These results show that the photovoltaic output current and power of the oriented films are highly improved to be equal to those of semiconductors and suitable for application in the optical sensor of micro-electro-mechanical systems (MEMS).

Paper Details

Date Published: 5 January 2006
PDF: 8 pages
Proc. SPIE 6035, Microelectronics: Design, Technology, and Packaging II, 60350P (5 January 2006); doi: 10.1117/12.638323
Show Author Affiliations
Masaaki Ichiki, National Institute of Advanced Industrial Science and Technology (Japan)
Harumi Furue, National Institute of Advanced Industrial Science and Technology (Japan)
Takeshi Kobayashi, National Institute of Advanced Industrial Science and Technology (Japan)
Yasushi Morikawa, National Institute of Advanced Industrial Science and Technology (Japan)
Takeshi Nakada, Tokyo Denki Univ. (Japan)
Chiaki Endo, Takashima Sangyo Co. Ltd. (Japan)
Kazuhiro Nonaka, National Institute of Advanced Industrial Science and Technology (Japan)
Ryutaro Maeda, National Institute of Advanced Industrial Science and Technology (Japan)


Published in SPIE Proceedings Vol. 6035:
Microelectronics: Design, Technology, and Packaging II
Alex J. Hariz, Editor(s)

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