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Proceedings Paper

Polymeric electro-optical channel waveguide fabricated by lithography and wet chemical etching
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Paper Abstract

Electro-optical channel waveguide is fabricated using an optical nonlinear polymer developed by doping dye organic molecules in a host polymer system and followed by an electric field poling step. A single-mode polymeric electrooptical channel waveguide is modeled using the BeamProp. Photolithography followed by wet chemical etching is used to fabricate the polymeric channel waveguide. A fabrication process is described. Results from a systematic evaluation of the film and waveguide physical and optical properties using AFM, profilometer, ellipsometer and the Maker Fringe technique is presented.

Paper Details

Date Published: 18 January 2006
PDF: 9 pages
Proc. SPIE 6038, Photonics: Design, Technology, and Packaging II, 60381Q (18 January 2006); doi: 10.1117/12.638302
Show Author Affiliations
Kevin Le, The Univ. of Texas at Arlington (United States)
Ping Zhang, The Univ. of Texas at Arlington (United States)
Hans Hu, The Univ. of Texas at Arlington (United States)
J.-C. Chiao, The Univ. of Texas at Arlington (United States)


Published in SPIE Proceedings Vol. 6038:
Photonics: Design, Technology, and Packaging II
Derek Abbott; Yuri S. Kivshar; Halina H. Rubinsztein-Dunlop; Shanhui Fan, Editor(s)

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