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Proceedings Paper

Investigation of ion-implanted layers by x-ray reflectometry method
Author(s): A. G. Touryanski; N. N. Gerasimenko; S. A. Aprelov; I. V. Pirshin; A. I. Poprygo; V. M. Senkov
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Paper Abstract

Investigation of ion-implanted structures by means of X-ray reflectometry was carried out. For this purpose the new methods of reflectivity measurements and the experimental data treatment were developed: double beam method of X-ray reflectometry and the subtraction of trend. The depths or widths of implanted layers, its average density were determined.

Paper Details

Date Published: 6 December 2006
PDF: 7 pages
Proc. SPIE 5943, X-ray and Neutron Capillary Optics II, 59430G (6 December 2006); doi: 10.1117/12.637912
Show Author Affiliations
A. G. Touryanski, Institute for Roentgen Optics (Russia)
N. N. Gerasimenko, Institute for Electronic Technology (Russia)
S. A. Aprelov, Institute for Electronic Technology (Russia)
I. V. Pirshin, P.N. Lebedev Physical Institute (Russia)
A. I. Poprygo, Institute for Roentgen Optics (Russia)
V. M. Senkov, Institute for Roentgen Optics (Russia)

Published in SPIE Proceedings Vol. 5943:
X-ray and Neutron Capillary Optics II
Muradin A. Kumakhov; Richard B. Hoover, Editor(s)

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