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Proceedings Paper

The design of saw-shaped distributed MEMS phase shifter for Ka band
Author(s): Qun Wu; Bo-shi Jin; Yu-ming Wu; Le-Wei Li; Jia-Hui Fu
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Paper Abstract

The paper presents a model which describes the stage circuit of Distributed MEMS Transmission Line (DMTL) phase shifter at Ka band and an approach for DMTL design utilizing the saw-shaped coplanar waveguide (SCPW). The approach of MEMS bridges and fabrication process are discussed in details. The result of circuit simulation and full wave analysis prove that the model is in good agreement with theoretical analysis. The model can effectively simplify the design complexity after optimization. Simulation results show that the S11 and S21 can achieve –20 dB and -2.5 dB at Ka band, respectively. Comparing with literature data, it has been predicted that S11 improves about 8 dB.

Paper Details

Date Published:
PDF: 7 pages
Proc. SPIE 6035, Microelectronics: Design, Technology, and Packaging II, 60351J; doi: 10.1117/12.637884
Show Author Affiliations
Qun Wu, Harbin Institute of Technology (China)
Bo-shi Jin, Harbin Institute of Technology (China)
Yu-ming Wu, Harbin Institute of Technology (China)
Le-Wei Li, Harbin Institute of Technology (China)
National Univ. of Singapore (Singapore)
Jia-Hui Fu, Harbin Institute of Technology (China)

Published in SPIE Proceedings Vol. 6035:
Microelectronics: Design, Technology, and Packaging II
Alex J. Hariz, Editor(s)

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