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Proceedings Paper

Base technology process for linear CCD
Author(s): Evgeny V. Kostykov; Alexander A. Skrylev
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Paper Abstract

The base manufacturing techniques of solid-state silicon photodetectors of the visible range - photosensitive devices with charging communication are described by the example of linear CCD. Characteristics of linear photodetectors are resulted.

Paper Details

Date Published: 6 December 2006
PDF: 10 pages
Proc. SPIE 5944, Smart Imagers and Their Application, 594407 (6 December 2006); doi: 10.1117/12.637785
Show Author Affiliations
Evgeny V. Kostykov, SPE Pulsar (Russia)
Alexander A. Skrylev, SPE Pulsar (Russia)

Published in SPIE Proceedings Vol. 5944:
Smart Imagers and Their Application
Alexander L. Stempkovsky; Victor A. Shilin, Editor(s)

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