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Proceedings Paper

Implementation of x-ray methods for investigation of nanosize semiconductor structures
Author(s): Nikolay N. Gerasimenko
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Paper Abstract

The great possibilities of X-ray techniques for investigation of solid state structures electronic systems and components are widely known. But this technique very useful for conventional applications has some limitations mostly connected with size of apparatus, energy consumption, space limitation, cost and hazard for health. The new generation of such apparatus based on implementation of polycapillary optics for X-ray focusing (Kumakhov lens) gave the great advantages for mass and routine analysis even for industry applications because of easy avoiding of most above-mentioned problems. But in this paper we will mostly discuss the little bit different way of application of this technique devoted to investigation of very new solid state and electronic structures which use elements with nanosize (quantum size) components. Those elements obtain principally new properties and give the possibility to construct absolutely new version of semiconductor devices and electronic integrated schemes. But the progress in this direction is connected not only with developing of new technological processes for production but at the same time with necessity of using new methods for investigation. This last problem is still not solved completely and most effective technique as demonstrated by very recent publications is connected with using of synchrotron radiation. This approach leads to creation of new possibilities for investigation of quantum size elements like quantum dots (QD) and quantum wires (QW).

Paper Details

Date Published: 6 December 2006
PDF: 24 pages
Proc. SPIE 5943, X-ray and Neutron Capillary Optics II, 59430A (6 December 2006); doi: 10.1117/12.637778
Show Author Affiliations
Nikolay N. Gerasimenko, Moscow Institute for Electronic Technology (Russia)
Institute for Roentgen Optics (Russia)

Published in SPIE Proceedings Vol. 5943:
X-ray and Neutron Capillary Optics II
Muradin A. Kumakhov; Richard B. Hoover, Editor(s)

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