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Proceedings Paper

Improving the sensitivity of biosensor by use of the Ag and SiO2 films
Author(s): Ling-Chih Kao; Ming-Hung Chiu; Bo-Yuan Shih; Chih-Hsien Shih; Cheng-Ru Tsai; Fuh-Shyang Juang
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Paper Abstract

For improving the sensitivity of a SPR biosensor, we proposed a new combination of the thin silver (Ag) and SiO2 films, and used the common-path heterodyne interferometry. Although the Ag film has higher sensitivity than the gold (Au) film1, but Ag has toxicity for many media and it is easy to be oxidized. In order to enhance the sensitivity and protect the tested medium not to directly contact with Ag, we selected a coating of SiO2 on the Ag film for the reason of it is cheaper and easy to obtain. The simulations and experimental results are shown that its best resolution could reach to the value of 6.9×10-9RIU.

Paper Details

Date Published: 29 December 2005
PDF: 8 pages
Proc. SPIE 6037, Device and Process Technologies for Microelectronics, MEMS, and Photonics IV, 60370W (29 December 2005); doi: 10.1117/12.637735
Show Author Affiliations
Ling-Chih Kao, National Formosa Univ. (Taiwan)
Ming-Hung Chiu, National Formosa Univ. (Taiwan)
Bo-Yuan Shih, National Formosa Univ. (Taiwan)
Chih-Hsien Shih, National Formosa Univ. (Taiwan)
Cheng-Ru Tsai, National Formosa Univ. (Taiwan)
Fuh-Shyang Juang, National Formosa Univ. (Taiwan)


Published in SPIE Proceedings Vol. 6037:
Device and Process Technologies for Microelectronics, MEMS, and Photonics IV
Jung-Chih Chiao; Andrew S. Dzurak; Chennupati Jagadish; David V. Thiel, Editor(s)

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