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Proceedings Paper

Gabor filters in industrial inspection: a review. Application to semiconductor industry
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Paper Abstract

This paper focuses on reviewing some recent works of the use of Gabor filters dealing with industrial applications. After a brief recall of Gabor filter basis, the two usual uses of Gabor filters are recalled: filter bank approach and filter design approach. The third part presents recent published works domain by domain. A fourth part exposes our own work with Gabor Filters for defect detection on semiconductor. A short conclusion summarizes the paper.

Paper Details

Date Published: 7 November 2005
PDF: 10 pages
Proc. SPIE 6001, Wavelet Applications in Industrial Processing III, 600108 (7 November 2005); doi: 10.1117/12.637675
Show Author Affiliations
F. Meriaudeau, Univ. of Burgundy (France)
F. Truchetet, Univ. of Burgundy (France)
O. Laligant, Univ. of Burgundy (France)
P. Bourgeat, BioMedIA Lab., CSIRO (Australia)

Published in SPIE Proceedings Vol. 6001:
Wavelet Applications in Industrial Processing III
Frederic Truchetet; Olivier Laligant, Editor(s)

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