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Proceedings Paper

Defect mapping system for optoelectronic materials
Author(s): K. S .R. K. Rao; K. R. Ramakrishnan; Vikram Kumar
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Paper Abstract

The defect mapping system is built on the principle of Scanning Optical Microscope (SOM). It''s essentially an optical probe with an xY translational stage and a Data Acquisition System (DAS). The SOM can be used in three different modes namely Reflection Transmission and Light Beam Induced Current (LBIC). In this paper the instrumentation and it''s capability as SOM and in LBIC mode has been demonstrated. I

Paper Details

Date Published: 16 December 1992
PDF: 4 pages
Proc. SPIE 1622, Emerging Optoelectronic Technologies, (16 December 1992); doi: 10.1117/12.636962
Show Author Affiliations
K. S .R. K. Rao, Indian Institute of Science (India)
K. R. Ramakrishnan, Indian Institute of Science (India)
Vikram Kumar, Indian Institute of Science (India)

Published in SPIE Proceedings Vol. 1622:
Emerging Optoelectronic Technologies
Krishna Shenai; Ananth Selvarajan; C. Kumar N. Patel; C. N. R. Rao; B. S. Sonde; Vijai K. Tripathi, Editor(s)

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