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Proceedings Paper

Ultra-thin metallic foil thickness measurement system using fiber optic low-coherence interferometry
Author(s): Yanli Du; Huimin Yan; Yongjun Nie; Xiuda Zhang
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Paper Abstract

The thickness of metallic foil is measured by differential low-coherence interferometry. Two tandem Michelson Interferometers (MI), of which reflective surfaces measured are the corresponding surfaces of metallic foil, are used as basic interferometric system to obtain interference fringes on a spectrometer. Therefore, the interference fringes only depend on the path differences due to the thickness of metallic foil. The interference fringes are analyzed with a modified extremum method based on the least root mean square (RMS) deviation. The experimental results on thickness measurement are presented.

Paper Details

Date Published: 5 December 2005
PDF: 7 pages
Proc. SPIE 6019, Passive Components and Fiber-based Devices II, 60194H (5 December 2005); doi: 10.1117/12.635509
Show Author Affiliations
Yanli Du, Zhejiang Univ. (China)
Huimin Yan, Zhejiang Univ. (China)
Yongjun Nie, Zhejiang Univ. (China)
Xiuda Zhang, Zhejiang Univ. (China)


Published in SPIE Proceedings Vol. 6019:
Passive Components and Fiber-based Devices II
Yan Sun; Jianping Chen; Sang Bae Lee; Ian H. White, Editor(s)

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