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Proceedings Paper

Modification of an EBIC mode in the SEM for imaging of ferroelectric domains
Author(s): Alexander A. Sogr; Irena B. Kopylova; Anna G. Maslovskaya
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Paper Abstract

A new mode of imaging of ferroelectric domains in the scanning electron microscope (SEM) has been developed. Like the electron beam induced current (EBIC) mode the sample is covered by thin metal electrodes. The electrons with the incrased energy (10-40 keV) penetrate through a thin electrode and stimulate polarization processes in the bulk of the sample. The electric response is read from the circuit between front and back electrodes. The mechanism of the response forming and the problems of the method resolution are discussed.

Paper Details

Date Published: 8 June 2005
PDF: 5 pages
Proc. SPIE 5851, Fundamental Problems of Optoelectronics and Microelectronics II, (8 June 2005); doi: 10.1117/12.634075
Show Author Affiliations
Alexander A. Sogr, Amur State Univ. (Russia)
Irena B. Kopylova, Amur State Univ. (Russia)
Anna G. Maslovskaya, Amur State Univ. (Russia)


Published in SPIE Proceedings Vol. 5851:
Fundamental Problems of Optoelectronics and Microelectronics II
Yuri N. Kulchin; Oleg B. Vitrik; Vladimir I. Stroganov, Editor(s)

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