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Proceedings Paper

Recent progress of SOI-based photonic devices
Author(s): Jinzhong Yu; Shaowu Chen; Zhiyong Li; Yuanyuan Chen; Fei Sun; Yuntao Li; Yanping Li; Jingwei Liu; Di Yang; Jinsong Xia; Chuanbo Li; Qiming Wang
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Paper Abstract

SOI (Silicon on Insulator) based photonic devices, including stimulated emission from Si diode, RCE (Resonant Cavity Enhanced) photodiode with quantum structure, MOS (Metal Oxide Semiconductor) optical modulator with high frequency, SOI optical matrix switch and wavelength tunable filter are reviewed in the paper. The emphasis will be played on our recent results of SOI-based thermo-optic waveguide matrix switch with low insertion loss and fast response. A folding re-arrangeable non-blocking 4×4 matrix switch with total internal reflection (TIR) mirrors and a first blocking 16×16 matrix were fabricated on SOI wafer. The extinction ratio and the crosstalk are better. The insertion loss and the polarization dependent loss (PDL) at 1.55 μm increase slightly with longer device length and more bend and intersecting waveguides. The insertion losses are expected to decrease 2~3 dB when anti-reflection films are added in the ends of the devices. The rise and fall times of the devices are 2.1 μs and 2.3 μs, respectively.

Paper Details

Date Published: 2 December 2005
PDF: 10 pages
Proc. SPIE 6020, Optoelectronic Materials and Devices for Optical Communications, 60201R (2 December 2005); doi: 10.1117/12.633878
Show Author Affiliations
Jinzhong Yu, Institute of Semiconductors (China)
Shaowu Chen, Institute of Semiconductors (China)
Zhiyong Li, Institute of Semiconductors (China)
Yuanyuan Chen, Institute of Semiconductors (China)
Fei Sun, Institute of Semiconductors (China)
Yuntao Li, Institute of Semiconductors (China)
Yanping Li, Institute of Semiconductors (China)
Jingwei Liu, Institute of Semiconductors (China)
Di Yang, Institute of Semiconductors (China)
Jinsong Xia, Institute of Semiconductors (China)
Chuanbo Li, Institute of Semiconductors (China)
Qiming Wang, Institute of Semiconductors (China)


Published in SPIE Proceedings Vol. 6020:
Optoelectronic Materials and Devices for Optical Communications
Shinji Tsuji; Jens Buus; Yi Luo, Editor(s)

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