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Proceedings Paper

Influence of laser pulse duration on microstructuring of silicon surface
Author(s): G. D. Shandybina; G. M. Martsinovsky; S. M. Sarnakov
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Paper Abstract

The paper proposes an approach to classification of different types of laser-induced surface micro-structures. The approach is based on the relation between different ranges of laser pulse duration and determinant mechanisms of micro-structuring including thermo-mechanical, optical and electrical effects. Detailed analysis of kinetics of silicon surface micro-structuring in millisecond range and consideration of polariton mechanism of microstructuring in nanosecond range resulted in assumption, that inhomogeneous electrical field must be the determinant factor for micro-structuring in femtosecond range.

Paper Details

Date Published: 7 June 2005
PDF: 3 pages
Proc. SPIE 5850, Advanced Laser Technologies 2004, (7 June 2005); doi: 10.1117/12.633680
Show Author Affiliations
G. D. Shandybina, St. Petersburg State Univ. of Information Technologies, Mechanics and Optics (Russia)
G. M. Martsinovsky, St. Petersburg State Univ. of Information Technologies, Mechanics and Optics (Russia)
S. M. Sarnakov, St. Petersburg State Univ. of Information Technologies, Mechanics and Optics (Russia)


Published in SPIE Proceedings Vol. 5850:
Advanced Laser Technologies 2004
Ivan A. Shcherbakov; Anna Giardini; Vitali I. Konov; Vladimir I. Pustovoy, Editor(s)

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