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Proceedings Paper

Three-dimensional shape measurement using focus method by using liquid crystal grating and liquid varifocus lens
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Paper Abstract

This paper describes a surface profile measurement using a varifocus lens by an optical sectioning. The focus method is utilized for a uni-axis optical system of projection and observation. The varifocus lens is mounted on between a liquid crystal grating and a projection lens. A focus length can be continuously varied from a concave to a convex shape by changing the liquid pressure. The contrast of projected pattern onto the sample is approximated the Gauss distribution along the distance and indicates sharpest at the focused plane. It is possible to analyze the contrast distribution by a grating projected method using a liquid crystal grating with 4 steps phase-shifting method. The liquid crystal grating is powerful tool to make arbitrary intensity and frequency distribution. Surface profiles of mechanical parts have been measured to demonstrate for this method.

Paper Details

Date Published: 7 November 2005
PDF: 7 pages
Proc. SPIE 6000, Two- and Three-Dimensional Methods for Inspection and Metrology III, 60000J (7 November 2005); doi: 10.1117/12.633147
Show Author Affiliations
Yasuhiro Mizutani, Tokyo Univ. of Agriculture and Technology (Japan)
Ryoichi Kuwano, Tokyo Univ. of Agriculture and Technology (Japan)
Yukitoshi Otani, Tokyo Univ. of Agriculture and Technology (Japan)
Norihiro Umeda, Tokyo Univ. of Agriculture and Technology (Japan)
Toru Yoshizawa, Tokyo Univ. of Agriculture and Technology (Japan)


Published in SPIE Proceedings Vol. 6000:
Two- and Three-Dimensional Methods for Inspection and Metrology III
Kevin G. Harding, Editor(s)

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