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Proceedings Paper

Improved file sizes and cycle times through optimization of GDSII stream
Author(s): Chin Le; David Gariepy
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Paper Abstract

Filling for the prevention of CMP dishing and resolution enhancement technologies (OPC, PSM) can cause the size of IC designs represented in the popular GDSII Stream format to balloon by a factor of ten or more, resulting file sizes of tens of gigabytes and longer throughput times for the tools that must subsequently process the files. We describe the effects of optimizing GDSII Stream files on the tape-out flow. GDSII Stream file sizes can be reduced by as much as 95% (20X reduction) and subsequent tool throughput improved by factors of up to five (5X runtime improvement).

Paper Details

Date Published: 5 November 2005
PDF: 8 pages
Proc. SPIE 5992, 25th Annual BACUS Symposium on Photomask Technology, 599213 (5 November 2005); doi: 10.1117/12.631780
Show Author Affiliations
Chin Le, Micron Technologies, Inc. (United States)
David Gariepy, Saratoga Data Systems, Inc. (United States)


Published in SPIE Proceedings Vol. 5992:
25th Annual BACUS Symposium on Photomask Technology
J. Tracy Weed; Patrick M. Martin, Editor(s)

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