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Proceedings Paper

Benchmark of FEM, waveguide, and FDTD algorithms for rigorous mask simulation
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Paper Abstract

An extremely fast time-harmonic finite element solver developed for the transmission analysis of photonic crystals was applied to mask simulation problems. The applicability was proven by examining a set of typical problems and by a benchmarking against two established methods (FDTD and a differential method) and an analytical example. The new finite element approach was up to 100 times faster than the competing approaches for moderate target accuracies, and it was the only method which allowed to reach high target accuracies.

Paper Details

Date Published: 4 November 2005
PDF: 12 pages
Proc. SPIE 5992, 25th Annual BACUS Symposium on Photomask Technology, 599216 (4 November 2005); doi: 10.1117/12.631696
Show Author Affiliations
Sven Burger, Zuse Institute Berlin (Germany)
JCMwave GmbH (Germany)
Roderick Köhle, Infineon Technologies AG (Germany)
Lin Zschiedrich, Zuse Institute Berlin (Germany)
JCMwave GmbH (Germany)
Weimin Gao, Sigma-C Software AG (Germany)
Frank Schmidt, Zuse Institute Berlin (Germany)
JCMwave GmbH (Germany)
Reinhard März, JCMwave GmbH (Germany)
Infineon Technologies AG (Germany)
Christoph Nölscher, Infineon Technologies AG (Germany)


Published in SPIE Proceedings Vol. 5992:
25th Annual BACUS Symposium on Photomask Technology
J. Tracy Weed; Patrick M. Martin, Editor(s)

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