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Proceedings Paper

Regular dislocation networks in silicon as a tool for nanostructure devices
Author(s): Martin Kittler
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Proc. SPIE 6003, Nanostructure Integration Techniques for Manufacturable Devices, Circuits, and Systems: Interfaces, Interconnects, and Nanosystems, 600302; doi: 10.1117/12.631283
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Martin Kittler, IHP Microelectronics (Germany)


Published in SPIE Proceedings Vol. 6003:
Nanostructure Integration Techniques for Manufacturable Devices, Circuits, and Systems: Interfaces, Interconnects, and Nanosystems
Minoru M. Freund; M. Saif Islam; Achyut K. Dutta, Editor(s)

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