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Proceedings Paper

Carbon nanotube growth from ion-implanted catalyst by chemical vapor deposition
Author(s): Yongho Choi; Jennifer Sippel Oakley; Andrew Rinzler; Ant Ural
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Paper Abstract

We present experimental evidence that iron ions implanted into silicon/silicon dioxide substrates form nanoscale islands during subsequent annealing, which act as catalyst for nanotube chemical vapor deposition (CVD) growth. We have implanted Fe+ ions into thermally grown SiO2 layers on silicon substrates with an energy of 60 keV and a dose of 1015 cm-2. Using this implanted catalyst, we have then grown carbon nanotubes by CVD at 900°C with methane as the precursor gas. We have characterized the catalyst islands and the grown carbon nanotubes by Atomic Force Microscopy (AFM) and Raman spectroscopy. The diameters of carbon nanotubes we have grown from ion implanted catalyst in this work are much smaller than those reported previously. The presence of small diameter nanotubes implies single-walled nanotube (SWNT) growth. The height distribution of the catalyst islands correlates very well with the diameter distribution of nanotubes. This is consistent with previous work which has found evidence that nanotube diameter depends strongly on the size of the catalyst particles. Since ion-implantation can be easily masked by lithography, this technique of nucleating nanotube growth opens up the possibility of controlling the origin of nanotubes at the nanometer scale over high aspect ratio topography. This technique also has the advantage that it can easily be integrated with silicon processing, and scaled to larger substrates.

Paper Details

Date Published: 17 November 2005
PDF: 8 pages
Proc. SPIE 6008, Nanosensing: Materials and Devices II, 600805 (17 November 2005); doi: 10.1117/12.630924
Show Author Affiliations
Yongho Choi, Univ. of Florida (United States)
Jennifer Sippel Oakley, Univ. of Florida (United States)
Andrew Rinzler, Univ. of Florida (United States)
Ant Ural, Univ. of Florida (United States)

Published in SPIE Proceedings Vol. 6008:
Nanosensing: Materials and Devices II
M. Saif Islam; Achyut K. Dutta, Editor(s)

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