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Proceedings Paper

Vacuum-sealed high temperature high bandwidth fiber optic pressure and acoustic sensors
Author(s): Juncheng Xu; Gary R. Pickrell; Xingwei Wang; Bing Yu; Kristie L. Cooper; Anbo Wang
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Paper Abstract

A novel vacuum-sealed miniature optical fiber sensor for static pressure or acoustic wave measurement is presented. This pressure sensor functions as a diaphragm-based extrinsic Fabry-Perot interferometric (DEFPI) sensor. The sensor can work at high temperatures because of its all-silica structure. In static pressure measurement, the sensor's measurement range can be set up to 15,000psi with different thickness diaphragms. For acoustic applications, the sensor resonant frequency is higher than 600kHz. Evacuation of the sensor's cavity eliminates the thermally induced inner pressure changes (which is a common problem in pressure sensors) and therefore improves the accuracy and repeatability. In addition, the sensor fabrication process is simple, fast, controllable and low cost. This fiber sensor is immune to electromagnetic interference (EMI), and corrosion resistant.

Paper Details

Date Published: 5 November 2005
PDF: 6 pages
Proc. SPIE 5998, Sensors for Harsh Environments II, 599809 (5 November 2005); doi: 10.1117/12.630802
Show Author Affiliations
Juncheng Xu, Virginia Polytechnic Institute and State Univ. (United States)
Gary R. Pickrell, Virginia Polytechnic Institute and State Univ. (United States)
Xingwei Wang, Virginia Polytechnic Institute and State Univ. (United States)
Bing Yu, Virginia Polytechnic Institute and State Univ. (United States)
Kristie L. Cooper, Virginia Polytechnic Institute and State Univ. (United States)
Anbo Wang, Virginia Polytechnic Institute and State Univ. (United States)


Published in SPIE Proceedings Vol. 5998:
Sensors for Harsh Environments II
Anbo Wang, Editor(s)

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