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Proceedings Paper

High resolution angular measurement using surface-plasmon-resonance heterodyne interferometry at optimal incident wavelengths
Author(s): Hai-Pang Chiang; Jing-Lun Lin; Railing Chang; Zhi-Wei Chen; Pui Tak Leung
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Paper Abstract

We have recently demonstrated that ultra high resolution of angular measurement down to 10-6 degree can be achieved via surface-plasmon-resonance heterodyne interferometry, in which the phase difference between p- and s- polarized reflected waves is monitored as a function of the incident angle. Here we give a brief summary of this technique and the rationale based on which such a measurement is possible. As a further study, we have also investigated, via simulation, how the change in environmental temperature will affect the resolution limit of this very versatile technique.

Paper Details

Date Published: 11 November 2005
PDF: 10 pages
Proc. SPIE 6002, Nanofabrication: Technologies, Devices, and Applications II, 600218 (11 November 2005); doi: 10.1117/12.630594
Show Author Affiliations
Hai-Pang Chiang, National Taiwan Ocean Univ. (Taiwan)
Institute of Physics, Academia Sinica (Taiwan)
Jing-Lun Lin, National Taiwan Ocean Univ. (Taiwan)
Institute of Physics, Academia Sinica (Taiwan)
Railing Chang, National Taiwan Ocean Univ. (Taiwan)
Institute of Physics, Academia Sinica (Taiwan)
Zhi-Wei Chen, National Taiwan Ocean Univ. (Taiwan)
Institute of Physics, Academia Sinica (Taiwan)
Pui Tak Leung, Portland State Univ. (United States)


Published in SPIE Proceedings Vol. 6002:
Nanofabrication: Technologies, Devices, and Applications II
Warren Y.-C. Lai; Leonidas E. Ocola; Stanley Pau, Editor(s)

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