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Proceedings Paper

RIM-13: a high-resolution imaging tool for aerial image monitoring of EUV reticles
Author(s): M. Booth; A. Brunton; J. Cashmore; P. Elbourn; G. Elliner; M. Gower; J. Greuters; J. Hirsch; L. Kling; N. McEntee; P. Richards; V. Truffert; I. Wallhead; M. Whitfield; R. Hudyma
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Paper Abstract

Key features are presented of the RIM-13 reticle imaging microscope developed for actinic aerial image monitoring of blank and patterned EUV reticles. Details of the opto-mechanical design, module layout, major subsystems including the EUV source and performance of the tool are presented.

Paper Details

Date Published: 7 November 2005
PDF: 12 pages
Proc. SPIE 5992, 25th Annual BACUS Symposium on Photomask Technology, 59922C (7 November 2005); doi: 10.1117/12.629562
Show Author Affiliations
M. Booth, Exitech Ltd. (United Kingdom)
A. Brunton, Exitech Ltd. (United Kingdom)
J. Cashmore, Exitech Ltd. (United Kingdom)
P. Elbourn, Exitech Ltd. (United Kingdom)
G. Elliner, Exitech Ltd. (United Kingdom)
M. Gower, Exitech Ltd. (United Kingdom)
J. Greuters, Exitech Ltd. (United Kingdom)
J. Hirsch, Exitech Ltd. (United Kingdom)
L. Kling, Exitech Ltd. (United Kingdom)
N. McEntee, Exitech Ltd. (United Kingdom)
P. Richards, Exitech Ltd. (United Kingdom)
V. Truffert, Exitech Ltd. (United Kingdom)
I. Wallhead, Exitech Ltd. (United Kingdom)
M. Whitfield, Exitech Ltd. (United Kingdom)
R. Hudyma, Hyperion Development LLC (United States)


Published in SPIE Proceedings Vol. 5992:
25th Annual BACUS Symposium on Photomask Technology
J. Tracy Weed; Patrick M. Martin, Editor(s)

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