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Proceedings Paper

MEMS-based humidity sensor
Author(s): S. Govardhan
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Date Published:
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Proc. SPIE 6037, Device and Process Technologies for Microelectronics, MEMS, and Photonics IV, ; doi: 10.1117/12.629088
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S. Govardhan, Vellore Institute of Technology (India)


Published in SPIE Proceedings Vol. 6037:
Device and Process Technologies for Microelectronics, MEMS, and Photonics IV
Jung-Chih Chiao; Andrew S. Dzurak; Chennupati Jagadish; David V. Thiel, Editor(s)

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